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Submitted by: Piezo Mechanism
There are several piezo actuator types that are currently available to motion control system designers.
A) Simple piezo actuator: Expands proportional to voltage, extension ~ 0.1 to 0.2 % of actuator length.
Piezo Actuator Features:
High force available, to thousands of pounds
Very fast response: microsecond to sub-millisecond
Frictionless, sub-nanometer resolution
travel range typically 10 to 200 m for stacked actuator; several mm for bender actuato
Feedback sensor can be integrated (typically Strain Gauge)
Sub-Groups:
Stacked Piezo Actuator (most common). Available in Multilayer construction (100 V) and classical stack design (500 to 1000 V). High force, motion typically limited to 200 m.
Shear Actuators: Lateral motion, allows design of small, very fast XY and XYZ systems. High force, travel typically limited to
Tube Actuators: Mostly used in micro pumping applications and as scanner tubes for microscopy. Very fast response (very low inertia), low force (can be fragile), travel range typically limited to 20 m. XY scanner tubes available
Bender Actuators: Available in Multilayer construction (100 V) and classical (bimorph) stacked design (200 to 1000 V). Low force (
B) Piezo Flexure-guided Precision Nano-Positioning Stage
These more complex systems use frictionless flexures and motion amplifiers to provide very straight and flat motion with longer travel.
Motion of integrated piezo actuator can be amplified by internal flexure amplifier. Typical motion range up to 2 mm.
Monolithic multiaxis-systems available
Frictionless, sub-nanometer resolution, fast response (to 0.1 millisec)
Essential for nanomanipulation, nanoalignment or scanning optical microscopy. Ideal for imaging resolution enhancement or stabilization.
Closed loop with feedback sensor (typically Strain Gauge for entry level, or capacitive for high-end systems / multi-axis measurements)
C1) Piezo Ultrasonic Motors
Based on high frequency oscillation of a piezo plate (stator).
Oscillation is transferred to a slide or rotor via friction.
Unlimited motion, high speed (to 800 mm in PILine designs), fast response (10 to 10s of millisecs).
But due to friction, resolution limited to typically 50 nm. Low forces, typically
PI USA complies with the US laws for export controlled technologies and provides R&D & engineering & repair services as well as applications support.
The PI family of companies employs more than 500 people world wide. PI is known throughout the high-tech world for its leadership in the design and manufacture of Nanometer-Level Motion Control Products, Piezo Ceramics and NanoActuators, Hexapod 6DOF Positioning Systems and Micro Robots.
Features R&D, engineering, repair, sales, service facilities, application labs, a large warehouse, and nanometrology equipment for test & calibration. Compliant with US laws for export controlled technologies. PI USA is ITAR registered, and equipped to handle your COTS or custom piezo / nanopositioning system requirements.
PI’s Nanopositioning products have won many international industry awards for innovative design. Examples are the Hexapod 6 Degree-of-Freedom Micropositioning and Alignment System, the ultra-high resolution Piezoelectric Scanning Stages and Active Optics (Beam Steering Systems). The PI line of piezoelectric actuators and nanopositioning stages are among the most sophisticated nanopositioning systems in the world, allowing extremely precise motion in the shortest possible time.
PI’s Nanopositioning products are world-known for their precision. To continuously improve our products and to verify the performance, we have designed a six-fold-isolated room-in-room metrology lab, on a separated foundation in the basement of the factory.
Sub-nanometer resolution measurements not only require highest precision measuring equipment (we use world-class laser interferometers and capacitive sensors), but also an environment with extremely high temperature stability and total absence of vibration. The acoustic sound waves of a conversation alone can excite vibration in the range of several 10 nanometers. That’s why the door to our metrology lab resembles that of a safe.
About the Author: PI USA complies with the US laws for export controlled technologies and provides R&D & engineering & repair services as well as applications support.The PI family of companies employs more than 500 people world wide. Read more
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